- Home
- Machinery
- Other Machinery & Industry Equipment
- Other Machinery & Industry Equipment
- Double head RF DC magnetron sputtering coater with bias power supply
Double head RF DC magnetron sputtering coater with bias power supply
Other Machinery & Industry Equipment | Other Machinery & Industry Equipment
USD 20,000.00 - 35,000.00 / Pieces
1
100
China
No
Product Description:
Double target magnetron sputtering coater is a small laboratory coater with two targets developed by our company. It can be used to prepare single or multi-layer ferroelectric film, conductive film, alloy film, semiconductor film, ceramic film, dielectric film, optical film, etc. Compared with ordinary plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high coating rate and low sample temperature rise, which is a typical high-speed low-temperature sputtering. The magnetron target is equipped with a water-cooled inter layer, the water cooler can effectively take away heat, avoid heat gathering on the target surface, and make the magnetron coating work stably for a long time. In addition, the device is also equipped with bias power supply, which can add bias electric field between the target and the sample platform, enhance the energy of ions, improve the film quality and adhesion of the film. The whole machine adopts touch screen control, one key coating procedure, simple operation, and is an ideal equipment for preparing thin film in the laboratory. Technical Parameters Item Detail Voltage AC220V,50Hz Power 3KW Ultimate vacuum 10-6 torr Sample stage Size:φ140mm Heating temperature:MAX.500℃ Accuracy:±1℃ Speed:1~20rpm adjustable Magnetron sputtering head Number: two ,2-inch Cooling mode: Water cooling,10L / min flow rate Vacuum Chamber Size:φ300mm × 300mm H Material:stainless steel Observation window:φ100mm Opening mode:Open top, easy to replace the target Gas flow controller 2 ways: Ar, N2;Range 0-100sccm Vacuum pump Molecular pump system, pumping speed: 600L/S Film thickness gauge Quartz vibrating film thickness gauge , resolution: 0.10 μ M Sputtering power supply One DC power supply, 1000W, suitable for preparing metal film One RF power supply, 500W, suitable for non-metallic coating Operation mode Panel button operation Dimensions 1400mm × 750mm × 1300mm Weight 300 KG
Supplier Details
Promoted Products
Similar Products
-
Three targets magnetron sputtering coater (500W DC&500W RF)
USD 65,000.00 - 89,000.00/Pieces
Other Machinery & Industry Equipment
Min. order : 1 Pieces
-
Single-head RF magnetron sputtering coater for preparing single-layer films
USD 10,000.00 - 29,900.00/Unit
Other Machinery & Industry Equipment
Min. order : 1 Unit
-
BERNINA E16 16 Needle Embroidery Machine
USD 9,899.00/Unit
Other Machinery & Industry Equipment
Min. order : 1 Unit
-
Highlead GA2688 L Industrial Sewing Machine
USD 5,339.00/Unit
Other Machinery & Industry Equipment
Min. order : 1 Unit
-
Single heating zone rotary PECVD graphene preparation furnace
USD 26,000.00 - 31,500.00/Unit
Other Machinery & Industry Equipment
Min. order : 1 Unit
-
Tube Mill Machine Pipe Machinery for 304 stainless steel pipes
USD 300.00 - 10,000.00/Sets
Other Machinery & Industry Equipment
Min. order : 1 Sets
-
Three-zone rotary tube furnace with continuous powder feeding and receiving system
USD 7,500.00 - 15,900.00/Unit
Other Machinery & Industry Equipment
Min. order : 1 Unit
-
Small two-in-one coating machine for plasma sputtering and thermal evaporating
USD 5,200.00 - 10,000.00/Unit
Other Machinery & Industry Equipment
Min. order : 1 Unit
-
Electirc Hydraulic Pipe Bending Machine
USD 1,400.00 - 6,000.00/Sets
Other Machinery & Industry Equipment
Min. order : 1 Sets
-
Stainless steel molecular distillation equipment AYAN-F80-A-S essential oil distillation machine factory price
USD 25,000.00 - 30,000.00/Sets
Other Machinery & Industry Equipment
Min. order : 1 Sets
-
0-30KV high-voltage electrospinning machine for R&D lab
USD 14,500.00 - 20,000.00/Unit
Other Machinery & Industry Equipment
Min. order : 1 Unit
-
CNC Channel Letter Bender
USD 4,000.00 - 9,000.00/Sets
Other Machinery & Industry Equipment
Min. order : 1 Sets