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- Single-head RF magnetron sputtering coater for preparing single-layer films
Single-head RF magnetron sputtering coater for preparing single-layer films
Other Machinery & Industry Equipment | Other Machinery & Industry Equipment
USD 10,000.00 - 29,900.00 / Unit
1
100
China
No
Product Description:
单靶RF磁控溅射镀膜机是我公司自主研发的具有成本效益的磁控溅射镀膜设备。具有小型化,标准化的特点。磁控管靶头有1英寸,2英寸和3英寸可供选择。客户可以根据要镀的基板尺寸选择目标。该设备配备300W射频电源,可用于溅射非金属膜和光学膜。根据实验要求,可以选择其他规格的DC或RF电源来实现各种材料的涂覆操作。 涂布机配有两通道高精度质量流量计。如果您还有其他要求,则可以自定义多达四通道质量流量计的气体路径,以满足复杂的气体环境建设要求。该仪器配备了先进的涡轮分子泵组,极限真空度高达1.0E-5Pa,并且可以购买其他类型的分子泵。分子泵的气路由多个电磁阀控制,您可以在不关闭泵的情况下打开腔室以取出样品,从而大大提高了工作效率。该产品可以配备集成的工业计算机来控制系统。在计算机程序中,可以实现大多数功能,例如真空泵控制和溅射功率控制,从而可以进一步提高实验效率。 单靶RF磁控溅射镀膜机的应用: 该设备可用于制备单层陶瓷膜,介电膜,光学膜,氧化膜,硬膜,PTFE膜等。与同类设备相比,单靶磁控溅射镀膜机不仅用途广泛,而且具有体积小,操作简便的优点。它是用于实验室制备材料膜的理想设备,特别适合在实验室中研究固体电解质和OLED。
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